Semiconductor Products
Lytron Affinity provides a broad array of thermal management systems for chip manufacturing technologies, specializing in the design and manufacture of OEM chillers for high-end applications. Our global support infrastructure maximizes customer uptime and optimizes tool performance for demanding production environments.

Applications - Product Technical Data Sheets

• CVD/PVD
• Etch/Ashing, Wet Etch
• Implant
• RTP
• Inductively Coupled Plasma and Atomic Absorption Spectrometry (ICP/AA)
• Lithography
• Mass Spectroscopy (MS)
• MOCVD
• CMP
• Crystal Growing

Back-end:

• Cutting/Dicing
• Die Packaging and Die Testing
• Handlers and Testers
• Polishing/Grinding
• Cabinet Cooling
• Laser Marking